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Femtosecond laser and oscillation induced large-scale periodic micro/ nanostructures on copper surfaces
Shen, Xiaodong1; Zou, Bingsuo1,2,3; Huang, Chaowei1; Zhang, Yabin2,3; Liu, Tao2,3; Yang, Liang4
2023-06-01
摘要Femtosecond laser micro-nano machining has become an important field for novel material and/or structure fabrications. In this paper, we propose a new and efficient laser micro-nano fabrication technique on the metal surface, in which, a femtosecond laser combined with the ultralow frequency periodic oscillation of a two-phase stepping motor was used to fabricate a large-scale 20 mu m period micro/nanostructures on the copper metal surface by line scanning. The copper foils fabricated by this femtosecond laser show excellent superhydrophobic properties. Subsequently, we use femtosecond laser Z-shaped line scanning, combined with a two-phase stepping motor with ultralow frequency periodic oscillation, works on copper foil fabricate a micropores structure with a period span of 20 mu m. In addition, we simulated the butterfly wing superhydro-phobic micro/nanostructures on copper plates and fabricated superhydrophobic copper surfaces. This technique lays a solid foundation for the practical application of femtosecond laser lithography and is expected to be extended to other materials for new device applications.
关键词Femtosecond laser machining Periodic oscillation Large-scale period microstructure Superhydrophobic Copper surface
DOI10.1016/j.optlastec.2023.109166
发表期刊OPTICS AND LASER TECHNOLOGY
ISSN0030-3992
卷号161页码:7
通讯作者Zou, Bingsuo(zoubs@gxu.edu.cn) ; Yang, Liang(yangl@cigit.ac.cn)
收录类别SCI
WOS记录号WOS:000924509500001
语种英语