KMS Chongqing Institute of Green and Intelligent Technology, CAS
| Design and analysis of multilayer semiconductor sensor for acetone gas sensing | |
Fu, Jian Yu1; Wu, Di1 ; Zhou, Bo Tian1; Yuan, Ye1; Yan, Hu Yong1; Fu, Jian Yu2
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| 2014 | |
| 摘要 | Portable breath acetone sensor has great potential in diabetes diagnosis for acetone is a selective breath maker for diabetes. In this paper, we propose a multilayer semiconductor sensor for acetone gas sensing. Device is designed with stress adjustment layer, support layer, metal layer, insulator and sensing film. Simulation is performed, electrothermal and thermomechanical analyses demonstrate that this device has good performance in power consumption and thermomechanical reliability. © (2014) Trans Tech Publications, Switzerland. |
| 语种 | 英语 |
| DOI | 10.4028/www.scientific.net/AMM.687-691.1113 |
| 会议(录)名称 | 2014 International Conference on Manufacturing Technology and Electronics Applications, ICMTEA 2014
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| 页码 | 1113-1116 |
| 通讯作者 | Fu, Jian Yu |
| 收录类别 | EI |
| 会议地点 | Taiyuan, China |
| 会议日期 | November 8, 2014 - November 9, 2014 |
