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A High Precision and Large Range Measuring Method for Broadband Light Interferometric Microscopy Based on Phase Unwrapping and Stitching Algorithm 期刊论文
SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 卷号: 42, 期号: 8, 页码: 2411-2417
作者:  Zhao Wen-hao;  Li Jun;  Du Kai;  Xiong Liang;  Yin Shao-yun;  Hu Jian-ming;  Wang Jin-yu
收藏  |  浏览/下载：85/0  |  提交时间：2022/12/26
Broadband light interferometric microscopy  Phaseshift interferometry  Phase unwrapping  Three-dimensional topography measurement